Liquid ejecting head and liquid ejecting apparatus

ABSTRACT

A liquid ejecting head includes a flow channel forming substrate having pressure generation chambers communicating with a nozzle opening and arranged in parallel along a lateral direction. A piezoelectric element is provided on one surface of the flow channel forming substrate in correspondence to the pressure generation chamber, and has a first electrode, a piezoelectric layer provided on the first electrode and a second electrode provided on the piezoelectric layer. In a direction intersecting with the arrangement direction of the pressure generation chambers, in boundaries between an active section that is a substantial driving section and an inactive section that is not a substantial driving section of the piezoelectric layer, the first electrode includes a taper section of which a width is gradually decreased toward the boundary from the active section side.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims the benefit of priority to Japanese PatentApplication No. 2009-289790 filed Dec. 21, 2009, the contents of whichare hereby incorporated by reference in their entirety.

BACKGROUND

1. Technical Field

The present invention relates to a liquid ejecting head and a liquidejecting apparatus including a piezoelectric element.

2. Related Art

As a liquid ejecting head, here is an ink jet type recording headprovided with piezoelectric elements that includes a first electrode, apiezoelectric layer and a second electrode on one surface of the flowchannel forming substrate in which a pressure generation chamber linkingwith a nozzle opening is provided. The ink jet type recording headgenerates pressure change in the pressure generation chamber by means ofa driving force of the piezoelectric elements so that ink droplets areejected from the nozzle opening. There is a problem in thatpiezoelectric elements, which are used in such an ink jet type recordinghead, are easily broken due to the external environment, such ashumidity or the like. In order to solve this problem, for example, thesecond electrode is configured to cover the outer circumferentialsurface of the piezoelectric layer (for example, see JP-A-2005-88441).The first electrode is a common electrode and the second electrode is anindividual electrode in JP-A-2005-88441.

Also, an ink jet type recording head is suggested wherein a firstelectrode of the piezoelectric element is provided in each of thepressure generation chambers as an individual electrode and a secondelectrode is continuously provided in a plurality of pressure generationchambers as a common electrode (for example, see FIGS. 2 and 4 ofJP-A-2009-172878). According to the configuration, the second electrodeitself serves as a protective film of a surface section of thepiezoelectric layer so that there is no necessity to separately providea protective film.

In the piezoelectric element in which the second electrode is the commonelectrode as shown in FIGS. 2 and 4 of JP-A-2009-172878, for example, ina piezoelectric body section in which one of the upper and lower sideelectrodes is not present, because there is no electron supply source(electrode) that shields a polarization electric charge that is inducedon a piezoelectric body surface by a stress deformation, an instance ofinsulation damage or cracking readily occurs due to the inducedpolarization electric charge.

The above-described problem is present not only in the ink jet typerecording head but also in the liquid ejecting head ejecting liquidsother than ink.

SUMMARY

An advantage of some aspects of the invention is that it provides aliquid ejecting head and a liquid ejecting apparatus capable ofpreventing piezoelectric elements from being broken.

According to an aspect of the invention, a liquid ejecting head includesa flow channel forming substrate having a pressure generation chamberthat is linked with a nozzle opening and are arranged in parallel alonga lateral direction; and a piezoelectric element that is provided on onesurface of the flow channel forming substrate in correspondence to thepressure generation chamber, and has a first electrode, a piezoelectriclayer that is provided on the first electrode and a second electrodethat is provided on the piezoelectric layer, wherein the first electrodeis independently provided in correspondence to the pressure generationchamber, and the second electrode is continuously provided along thearrangement direction of the pressure generation chamber, and wherein inan direction intersecting with the arrangement direction of the pressuregeneration chamber, in at least one of boundaries between an activesection that is a substantial driving section and an inactive sectionthat is not a substantial driving section of the piezoelectric layer,the first electrode includes a taper section of which a width isgradually decreased toward the boundary from the active section side.

In this aspect, the taper section, of which the width is graduallydecreased toward the active section and the inactive section of thepiezoelectric element, is provided. Therefore, an area to which anelectric field of the first electrode per unit area of the piezoelectriclayer is applied can be gradually decreased toward the boundary, and astress concentration toward the boundary between the active section andthe inactive section can be decreased so that the piezoelectric elementcan be reliably prevented from being broken.

According to the aspect of the invention, it is preferable that thetaper section is provided such that the width thereof is graduallydecreased in the active section and the inactive section. Accordingly,the taper section is provided to the inactive section, and a boundarybetween an area where the first electrode (taper section) is present andan area where the first electrode is not present, in which a stiffnessis rapidly changed, and a boundary between the active section and theinactive section can be deviated, so that a stress concentration towardthe boundary between the active section and the inactive section can bedecreased and the piezoelectric element can be prevented from beingbroken.

According to the aspect of the invention, it is preferable that the sidesurface of the taper section is provided to form an angle of 45° or lesswith respect to the side surface of a straight-line section of a centerportion of the first electrode. Accordingly, the stress concentrationtoward the boundary between the active section and the inactive sectioncan be reliably decreased by the taper section having a predeterminedangle.

According to the aspect of the invention, it is preferable that in thedirection intersecting with the arrangement direction of the pressuregeneration chamber, an extending section extends to the outside of thepiezoelectric layer at one end portion side of the first electrode, andthe taper section is provided in at least one boundary opposite to theextending section of boundaries between the active section and theinactive section of the piezoelectric layer. Accordingly, in theextending section of the boundary between the active section and theinactive section of the piezoelectric element, the stiffness is notrapidly changed by the extending section so that breakage of thepiezoelectric element is more difficult compared to the opposite side ofthe extending section. The taper section is provided such that the widththereof is gradually decreased toward the boundary opposite to theextending section that is easily broken so that the stress in the areathat is easily broken can be reliably prevented from being concentrated.

According to the aspect of the invention, it is preferable that thetaper section is also provided in the boundary of the extending sectionside of the boundaries between the active section and the inactivesection of the piezoelectric layer. Accordingly, the boundary of theextending section side that is difficult to break can be furtherreliably prevented from being broken.

According to the aspect of the invention, it is preferable that thetaper section is provided so as to be symmetrical in the longitudinaldirection at the area in which the active section is formed.Accordingly, the taper section can be easily formed, dispersion of thestress can be prevented from being deviated, and thus stabledisplacement can be obtained.

According to the aspect of the invention, it is preferable that an area,at which the width is narrower than that of the straight-line section,which is provided on the center portion of the first electrode of theextending section, have a thickness thicker than that of thestraight-line section. Accordingly, an electrical resistance of the areaof which the width is narrowed, is lowered and the voltage drop can beprevented.

According to an aspect of the invention, a liquid ejecting apparatusincludes the liquid ejecting head according to the above descriptions.

In this aspect, a liquid ejecting apparatus having improved reliabilityand durability can be realized.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention will be described with reference to the accompanyingdrawings, wherein like numbers reference like elements.

FIG. 1 is an exploded perspective view of a recording head according toa first embodiment.

FIGS. 2A and 2B are sectional views of the recording head according tothe first embodiment.

FIGS. 3A and 3B are a plan view and an enlarged sectional view of mainparts of the recording head according to the first embodiment.

FIG. 4 is a graph showing an analysis result according to the firstembodiment.

FIG. 5 is a plan view showing a recording head according to a secondembodiment.

FIG. 6 is a plan view of a recording head according to a thirdembodiment.

FIG. 7 is a plan view of a recording head according to a fourthembodiment.

FIG. 8 is a plan view of a recording head according to a fifthembodiment.

FIG. 9 is a plan view of a recording head according to a sixthembodiment.

FIGS. 10A and 10B are a plan view and an enlarged sectional view of mainparts showing a recording head according to another embodiment.

FIG. 11 is a plan view of a recording head according to anotherembodiment.

FIG. 12 is a schematic view of a recording apparatus according to anembodiment.

DESCRIPTION OF EXEMPLARY EMBODIMENTS

Hereinafter, embodiments of the invention will be described in detail.

First Embodiment

FIG. 1 is an exploded perspective view of an ink jet type recordinghead, that is an example of a liquid ejecting head according to a firstembodiment of the invention, FIG. 2A is a sectional view of the ink jettype recording head and FIG. 2B is a sectional view taken along the lineIIB-IIB of FIG. 2A.

As shown in drawings, in this embodiment, a flow channel formingsubstrate 10 is made of a silicon monocrystal substrate, and an elasticfilm 50 made of silicon dioxide is formed on one surface thereof.

In the flow channel forming substrate 10, a plurality of pressuregeneration chambers 12 are arranged in parallel in a width directionthereof. Also, a linking section 13 is formed in an area outside in alongitudinal direction of the pressure generation chamber 12 of the flowchannel forming substrate 10, and the linking section 13 and each of theplurality of pressure generation chambers 12 is linked through an inksupply channel 14 and a linking channel 15 which are provided on each ofthe plurality of pressure generation chambers 12. The linking section 13is linked with a manifold section 31 of a protective substrate that willbe described below, and constitutes a part of the manifold serving as acommon ink chamber of each of the pressure generation chambers 12. Theink supply channel 14 is formed to have a width smaller than that of thepressure generation chamber 12, and constantly maintains flow channelresistance of ink flowing into the pressure generation chamber 12 fromthe linking section 13. In addition, in this embodiment, the ink supplychannel 14 is formed by narrowing a width of the flow channel on oneside, but the ink supply channel may be formed by narrowing the width ofthe flow channel on both sides. Alternatively, the ink supply channelmay be formed by narrowing in a thickness direction, instead of bynarrowing the width of the flow channel.

Also, in the embodiment, a liquid flow channel that is formed by thepressure generation chamber 12, the linking section 13, the ink supplychannel 14 and the linking channel 15 is provided on the flow channelforming substrate 10.

A nozzle plate 20 is fixed onto an opening surface side of the flowchannel forming substrate 10 by an adhesive, a thermally welding film orthe like. The nozzle plate 20 is provided with nozzle opening 21, eachof the nozzle openings linking with a vicinity of an end portion of thepressure generation chamber 12 opposite to the ink supply channel 14.The nozzle plate 20 is made of, for example, glass ceramics, a siliconmonocrystal substrate, stainless steel, or the like.

The elastic film 50 is formed on a side opposite to the opening surfaceof the flow channel forming substrate 10 as described above and aninsulator film 55 is formed on the elastic film 50. A piezoelectricelement 300 having a first electrode 60, a piezoelectric layer 70 and asecond electrode 80 which are laminated, is formed on the insulator film55. The piezoelectric element 300 is a portion that includes the firstelectrode 60, the piezoelectric layer 70 and a second electrode 80. Ingeneral, one electrode of piezoelectric element 300 serves as a commonelectrode, and the other electrode and the piezoelectric layer 70 arepatterned for each of pressure generation chambers 12. Thus, in an areathat is sandwiched by two electrodes of the piezoelectric layer 70, aportion in which a piezoelectric distortion is generated by applyingvoltage to both electrodes is an active section 320. In the embodiment,the first electrode 60 serves as an individual electrode of thepiezoelectric element 300 by providing the first electrode 60 to each ofpressure generation chambers 12 and the second electrode 80 serves as acommon electrode by providing the second electrode 80 in the pluralityof pressure generation chambers 12. In other words, a substantiallydriving area that is sandwiched between the first electrode 60 and thesecond electrode 80 of the piezoelectric layer 70 is an active section320 and a substantially non-driving area is an inactive section 330 inwhich one or both of electrodes 60 and 80 of the piezoelectric layer 70are not provided. Also, an apparatus having the piezoelectric element300, which is displaceable, is called an actuator apparatus. In theabove example, the elastic film 50, an insulator film 55 and the firstelectrode 60 serve as a vibration plate, but the invention is, ofcourse, not limited thereto and for example, alternatively only thefirst electrode 60 may be made as a vibration plate while the elasticfilm 50 and the insulator film 55 are not provided. In addition, thepiezoelectric element 300 itself may substantially serve as a vibrationplate.

The structure of the piezoelectric element 300 will be described indetail, referring to FIGS. 3A, 3B, and 4.

As shown in FIGS. 3A, 3B, and 4, the first electrode 60 constituting thepiezoelectric element 300 is independently provided in correspondence toeach of pressure generation chambers 12. Now, independently providingthe first electrode 60 in correspondence to each of pressure generationchambers 12 means the first electrode 60 is separated so as to bediscontinuous in the arrangement direction of the pressure generationchamber 12. In the embodiment, the first electrode 60 is provided with awidth narrower than that (a width of the pressure generation chamber 12in the arrangement direction) of a lateral direction of the pressuregeneration chamber 12 and thus the first electrode 60 is independentlyprovided in correspondence to each of the pressure generation chambers12.

The first electrodes 60 which are individually provided on each of thepressure generation chambers 12 are not electrically connected so as tofunction as an independent electrode of the piezoelectric element 300 bythemselves.

Furthermore, in an opposite end portion of the ink supply channel 14 ofthe first electrode 60, an extending section 65 is extended to furtheroutside the end portion of the piezoelectric layer 70 in thelongitudinal direction of the pressure generation chamber 12. The endportion of the extending section 65 is exposed without being coveredwith the piezoelectric layer 70 so that it becomes a connection terminalelectrically connected to a driving circuit 120 that will be describedbelow in detail. In other words, the first electrode 60 is drawn outfrom the piezoelectric element 300 and thus also functions as adrawn-out wiring to which the driving circuit 120 is connected. Ofcourse, an electrically conductive wiring that is different from thefirst electrode 60 may be separately provided as the drawn-out wiring.

An end portion of the ink supply channel 14 side of the first electrode60, in other words, an end portion of the side opposite to the extendingsection 65 is arranged so as to become an inside of the pressuregeneration chamber 12 side. In the embodiment, the end portion of theink supply channel 14 side of the first electrode 60 is provided so asto be at the same position as that of the end portion of the secondelectrode 80. Accordingly, the first electrode 60 defines the width ofthe lateral direction (the arrangement direction of the pressuregeneration chamber 12) of the active section 320, and the secondelectrode 80 defines a length of the longitudinal direction (andirection intersecting with the arrangement direction of the pressuregeneration chamber 12) of the active section 320. In the embodiment,because the end portion of the ink supply channel 14 side of the firstelectrode 60 is provided so as to be at the same position as that of thesecond electrode 80, the first electrode 60 may also define one endportion of the longitudinal direction of the active section 320.

In the direction (the longitudinal direction of the pressure generationchamber 12) intersecting with the arrangement direction of the pressuregeneration chamber 12, a taper section 61 is provided at one sideboundary A of both boundaries A and B between the active section 320 andthe inactive section 330 of the first electrode 60, wherein the width ofthe taper section 61 is gradually decreased toward the boundary A in thearea facing the active section 320. In other words, the first electrode60 has a straight-line section 62 that is formed having thesubstantially same width at a center portion of the longitudinaldirection of the pressure generation chamber 12, and a taper section 61that has a width that is gradually decreased continues to thestraight-line section 62. In the embodiment, the taper section 61 isprovided at the boundary A of the ink supply channel 14 side of thefirst electrode 60. Thus, the end portion of the taper section 61becomes the end portion (the boundary A) of the ink supply channel 14side of the active section 320 of the piezoelectric layer 70.

In the embodiment, a taper section 61 is provided even in a boundary Bbetween the active section 320 and the inactive section 330 of the sideopposite to the ink supply channel 14 in a longitudinal direction of thepressure generation chamber 12, wherein the width of the taper section61 is gradually decreased toward the boundary B in the active section320. In the side opposite to the ink supply channel 14 of the firstelectrode 60, the extending section 65 that is extended to the outsideof the piezoelectric layer 70, is provided. The extending section 65 hasa narrow width section 66 having a width narrower than that of thecentral straight-line section 62 of the first electrode 60 continuous tothe taper section 61, a gradual increasing section 67 that iscontinuously provided opposite to the taper section 61 in the narrowwidth section 66 and of which the width is gradually increased, and adrawn-out section 68 that is continuously provided to the gradualincreasing section 67 and of which the width is substantially the sameas that of the straight-line section 62. Thus, the end portion of thesecond electrode 80 comes to the boundary B between the taper section 61and the narrow width section 66 which are provided in the extendingsection 65 side of the first electrode 60. The end portion of the secondelectrode 80 defines one end portion (the boundary B) of thelongitudinal direction of the active section 320 in the longitudinaldirection of the pressure generation chamber 12.

The two taper sections 61 are formed such that the degree θ of the sidesurface thereof is an angle of 45° or less in regard to the side surfaceof the straight-line section 62. In other words, the degree of tip endof the taper section 61 is an angle of 90° or less. As described above,the degree of the taper section 61 is defined, so that a gradualdecreasing rate of an area that applies an electric field to thepiezoelectric layer 70 toward the boundary between the active section320 and the inactive section 330 can be set to a suitable value, thestress concentration to the boundary between the active section 320 andthe inactive section 330 can reliably be decreased, and risk of crackingdue to the stress concentration can be suppressed.

In the embodiment, the piezoelectric layer 70 is independently providedin correspondence to the pressure generation chamber 12. In other words,the piezoelectric layer 70 that is provided in each of pressuregeneration chambers 12 is separately provided in each of the pressuregeneration chambers 12 so as to discontinuous in the arrangementdirection of the pressure generation chamber 12.

The piezoelectric layer 70 is provided such that the width thereof iswider than that of the first electrode 60 in the lateral direction (thearrangement direction of the pressure generation chamber 12) of thepressure generation chamber 12 and narrower than that of the pressuregeneration chamber 12 in the lateral direction, and the piezoelectriclayer 70 covers the end surface of the first electrode 60 in the widthdirection.

The piezoelectric layer 70 is provided to be longer than the pressuregeneration chamber 12 in the longitudinal direction (the directionintersecting with the arrangement direction of the pressure generationsection 12) of the pressure generation section 12. In the embodiment,the piezoelectric layer 70 is provided in a size that covers the endportion of the ink supply channel 14 side of the first electrode 60 inthe longitudinal direction of the pressure generation chamber 12.

The piezoelectric layer 70 is provided to be shorter than the endportion opposite to the linking section 13 of the first electrode 60 inthe longitudinal direction of the pressure generation chamber 12 and aportion of the drawn-out wiring of the first electrode 60 is exposed.The driving circuit 120 is electrically connected to the exposed endportion of the first electrode 60.

The piezoelectric layer 70 is made by an piezoelectric materialindicating an electric-mechanical conversion action for example, aferroelectric material including Zr or Ti as a metal having a parasitestructure, a ferroelectric material such as lead zirconate titanate(PZT) or the like; or a material with an addition of a metal oxide ofniobium oxide, nickel oxide, magnesium oxide or the like. Specifically,examples of the piezoelectric material include lead zirconate titanate(Pb(Zr,Ti)O₃), barium zirconate titanate(Ba(Zr,Ti)O₃), lead lanthanumzirconate titanate ((Pb,La)(Zr,Ti)O₃) or lead magnesium niobatezirconium titanate (Pb(Zr,Ti)(Mg,Nb)O₃).

The thickness of the piezoelectric layer 70 is not specifically limited,but the thickness may be controlled to the extent that cracks do notoccur in the manufacturing process and the thickness may be thicklyformed to the extent that sufficient displacement characteristic ispresent. For example, the thickness of the piezoelectric layer 70 isformed in about 0.2 to 5 μm so that a preferable crystal structure caneasily obtained. In the embodiment, the film thickness of thepiezoelectric layer 70 is 1.2 μm so as to obtain optimal voltagecharacteristic.

A manufacturing method for the piezoelectric layer 70 is not limitedspecifically, and for example, a so-called sol that dissolves anddisperses the organic metal compound in a solvent is coated and dried soas to form a gel, and calcinated at high temperature so that thepiezoelectric layer 70 composed of the metal oxide is obtained, in otherwords, piezoelectric layer 70 can be obtained by so-called sol-gelmethod. Of course, the manufacturing method of the piezoelectric layer70 is not limited to the sol-gel method, and for example, a MOD(Metal-Organic Decomposition) method, a sputtering method or the likecan be also used.

In the embodiment, the piezoelectric layer 70 is independently providedin each of the pressure generation chambers 12. However, the inventionis not limited to the description and for example, the piezoelectriclayer 70 can be also be continuously provided in the plurality ofpressure generation chambers 12. In the embodiment, the piezoelectriclayer 70 is separately provided in each of pressure generation chambers12 independently so that the piezoelectric layer 70 does not disturb thedisplacement of the piezoelectric element 300.

The second electrode 80 is continuously provided along the arrangementdirection of the plurality of pressure generation chambers 12. Themeaning that the second electrode 80 is continuously provided in theplurality of pressure generation chambers 12 includes the case where thesecond electrode 80 is continuously provided between adjacent pressuregeneration chambers 12 as shown in FIG. 3A, and the case where thesecond electrode 80 is provided in a so-called comb teeth shape, thatis, the second electrode 80 is separated between the adjacent pressuregeneration chambers 12 and continuously provided in the outside betweenthe adjacent pressure generation chambers 12, as shown in FIG. 11described below.

In the longitudinal direction (the direction intersecting with thearrangement direction of the pressure generation chamber 12) of thepressure generation chamber 12, the second electrode 80 is providedwithin an area facing the pressure generation chamber 12. In otherwords, the end portion of the second electrode 80 in the longitudinaldirection (the longitudinal direction of the pressure generation chamber12) is provided so as to be positioned within the area of the pressuregeneration chamber 12.

In the extending section 65 side of the first electrode 60, the secondelectrode 80 is provided such that the end portion thereof is providedfurther inside than the first electrode 60, in other words, the endportion is positioned more toward the pressure generation chamber 12side rather than the first electrode 60, and the end portion of theactive section 320 of the piezoelectric layer 70 in the longitudinaldirection is defined at the extending section 65 side.

In the piezoelectric element 300 that is constituted of the firstelectrode 60, the piezoelectric layer 70 and the second electrode 80,the end portion of the active section 320 that is substantially thedriving section of the piezoelectric layer 70 in the lateral direction(width) is defined by the end portion of the width direction (thearrangement direction and the lateral direction of the pressuregeneration chamber 12) of the first electrode 60, and the end portion(length) of the active section 320 in the longitudinal direction isdefined by the end portion of the second electrode 80 in the lengthdirection(the longitudinal direction of the pressure generation chamber12). Thus, another area of the piezoelectric layer 70, in other words,an area where one or both of the first electrode 60 and the secondelectrode 80 are not provided is an inactive section. Accordingly, theboundary between the active section 320 and the inactive section 330 isdefined by the first electrode 60 and the second electrode 80.

As described above, in such the piezoelectric element 300, because thetaper section 61 is provided on the end portion of the ink supplychannel 14 side of the first electrode 60, the area of the firstelectrode 60 with respect to unit area of the piezoelectric layer 70 isgradually decreased by the taper section 61 toward boundaries A and Bbetween the active section 320 and the inactive section 330 from theactive section 320. Thus, an area that applies the electric field to thepiezoelectric layer 70 is gradually decreased by the taper section 61 ofthe first electrode 60 toward boundaries A and B of the inactive section330 from the active section 320. Because a displacement amount ischanged in correspondence to the area to which the electric field isapplied, the piezoelectric layer 70 gradually decreases the displacementamount toward boundaries A and B between the active section 320 and theinactive section 330 at the area in which the taper section 61 isprovided. Specifically, in the case that the taper section 61 is notprovided, when the piezoelectric element 300 is deformed, the stressconcentration is generated at the boundaries A and B between the activesection 320 and the inactive section 330. This means that one or both ofthe electrodes 60 and 80 are not provided, so that a difference in thestiffness of the piezoelectric element 300 is generated, the electricfield is applied to the piezoelectric layer 70 of the active section 320and the piezoelectric layer 70 is deformed. The electric field is notapplied to the piezoelectric layer 70 of the inactive section 330 andthe piezoelectric layer 70 is not deformed spontaneously (thedeformation is followed by the deformation of the active section 320),so that the stress concentration occurs at the boundary between theactive section 320 and the inactive section 330. However, in theembodiment, the taper section 61 is provided in the first electrode 60such that the width of the taper section 61 is gradually decreasedtoward the inactive section 330 from the active section 320 so that thearea to which the electric field is applied by the taper section 61 thatis in the boundary between the active section 320 and the inactivesection 330 can be gradually decreased toward the boundary. A force thatdeforms the piezoelectric layer 70 in the boundary between the activesection 320 and the inactive section 330 is gradually decreased so thatthe displacement amount of the boundary end portion of the activesection 320 can be decreased. As a result, a slope angle of the boundaryportion is gentle when the piezoelectric element 300 is displaced, andthe stress concentration of the boundary portion can be decreased. Thus,the risk of damage such as cracking at the boundaries A and B of thepiezoelectric layer 70 and near area thereof can be suppressed.

In the inactive section 330 where the boundary A forms the boundarybetween the active section 320 and the inactive section 330, both thefirst electrode 60 and the second electrode 80 are not provided, andthere is a large difference in stiffness between the active section 320and the inactive section 330 at both sides of the boundary A. In regardto this, in the inactive section 330 where the boundary B forms theboundary between the active section 320 and the inactive section 330,because the first electrode 60 is provided by the extending section 65,the difference in stiffness of the active section 320 and the inactivesection 330 on both sides of the boundary B is smaller than that for theboundary A. Thus, preferably the taper section 61 is provided at theboundary A in which at least the electrodes 60 and 80 are not providedat the inactive section 330. In the embodiment, the taper section 61 isalso provided at the boundary B of the active section 320 in theextending section 65 side. In addition, in the extending section 65side, because the first electrode 60 is provided by the extendingsection 65 to the inactive section 330 of the outside of the activesection 320, the stiffness of the piezoelectric element 300 is notrapidly changed at the boundary between the active section 320 and theinactive section 330. However, the stress is concentrated by thedeformation of the active section 320 at the boundary between the activesection 320 and the inactive section 330. Thus, the taper section 61 isprovided at the boundary between the active section 320 and the inactivesection 330 in the extending section 65 side so that the stressconcentration at the boundary B of the extending section 65 and thevicinity thereof is decreased and thus the risk of damage such ascracking or the like in the piezoelectric layer 70 can be suppressed.

In the embodiment, the taper section 61 is provided at the bothboundaries A and B of the ink supply channel 14 side and the extendingsection 65 side. Accordingly, two taper sections 61 can be asubstantially symmetrical structure in the longitudinal direction at thearea, which becomes the active section 320.

In the case that the piezoelectric element 300 in which the tapersection 61 of the above-described first embodiment is provided, isdriven in 25V, a relationship between the displacement amount (bendingamount) and the distance from the center of the pressure generationchamber 12 is calculated by simulation. Also, for comparison, thepiezoelectric element 300 that is not provided with the taper section 61in the first electrode 60 is set as a comparison example and in the casethat the piezoelectric element 300 of the comparison example is drivenin 25V the relationship between the displacement amount (bending amount)and the distance from the center of the pressure generation chamber 12is calculated by simulation. FIG. 4 shows the results these simulations.Also FIG. 4 is a graph showing the result of the simulation, where thedisplacement amount of the piezoelectric element in the state where thevoltage is not applied is set to 0 nm and the displacement toward thepressure generation chamber 12 side is indicated as a minus. The resultof the simulation as shown in FIG. 4 is in the boundary A side.

As shown in FIG. 4, the piezoelectric element 300 of the embodiment inwhich the taper section 61 is provided and the piezoelectric element ofthe comparison example in which the taper section 61 is not providedindicate the same displacement amount in the center side of the pressuregeneration chamber 12, so that even in the case of piezoelectric element300 of the embodiment, the ink ejection characteristic is not degradeddue to the displacement of the piezoelectric element 300.

As shown in FIG. 4, in the piezoelectric element 300 in which the tapersection 61 is not provided as in the comparison example, an angle ofinclination of an area S between an area (the end portion of thepressure generation chamber 12 in the longitudinal direction, in whichthe displacement amount is 0) that is fixed on the flow channel formingsubstrate 10 of the piezoelectric element 300 and the center potion thatis displaced so as to project to the inside of the pressure generationchamber 12 is formed rapidly (substantially vertically inclined).Meanwhile, in the piezoelectric element 300 of the embodiment in whichthe taper section 61 is provided, the angle of inclination of the area Sis formed gently. Thus, the taper section 61 is provided in the firstelectrode 60 so that the inclination of the area S is formed gently, thestress concentration at the boundaries A and B between the activesection 320 and the inactive section 330, and the vicinity thereof issuppressed. Thus, risk of damage such as cracking or the like can besuppressed. In addition, a range of the area S is defined by theboundaries A and B between the active section 320 and the inactivesection 330 of the piezoelectric layer 70.

As shown in FIG. 2B, in the embodiment, the end surface of the firstelectrode 60 is provided to be inclined with respect to the thicknessdirection. As described above, there is a difference between thecrystallization of the piezoelectric layer 70 in which the piezoelectricmaterial is a crystal grown and formed on the inclined end surface, andthe crystallization of the piezoelectric layer 70 in which thepiezoelectric material is a crystal grown and formed on the horizontalsurface (the straight-line section 62 or the like). Specifically, whenthe piezoelectric material is a crystal grown on the inclined surface,the crystal is grown to the vertical direction of the inclinationsurface and then is grown so as to deflect toward the verticaldirection, so that the piezoelectric layer 70 having the crystallizationinferior to that of the crystallization of the piezoelectric layer 70that is formed on the horizontal surface, is formed. As described above,because the piezoelectric layer 70 having inferior crystallization isformed on the end surface of the taper section 61, the piezoelectriclayer 70 on the taper section 61 has a voltage characteristic lower thanthat of the other area so that the displacement amount of thepiezoelectric layer 70 on the taper section 61 is decreased and thestress concentration of the boundaries A and B between the activesection 320 and the inactive section 330 can be decreased.

A protective substrate 30 having the manifold section 31 thatconstitutes at least a portion of a manifold 100, is bonded by adhesive35 on the flow channel forming substrate 10 in which the piezoelectricelement 300 is formed, in other words, on the first electrode 60 and theinsulator film 55. In the embodiment, the manifold section 31 penetratesthe protective substrate 30 along the thickness direction and is formedalong the width direction of the pressure generation chamber 12. Asdescribed above, the manifold section 31 is linked with the linkingsection 13 of the flow channel forming substrate 10, so as to constitutethe manifold 100 that is a common ink chamber of each of pressuregeneration chambers 12. Also, the linking section 13 of the flow channelforming substrate 10 may be divided in a plurality in each of pressuregeneration chambers 12 and then only the manifold section 31 may beprovided as the manifold. Furthermore, for example, only the pressuregeneration chamber 12 is provided in the flow channel forming substrate10 and the ink supply channel 14 that is linked with the manifold andeach of pressure generation chambers 12 in intermediate members (forexample, the elastic film 50, the insulator film 55 and the like)between the flow channel forming substrate 10 and the protectivesubstrate 30 may be also provided.

In the area facing the piezoelectric element 300 of the protectivesubstrate 30, a piezoelectric element holding section 32 occupies aspace to the extent that does not hinder the movement of thepiezoelectric element 300 is provided. The piezoelectric element holdingsection 32 may occupy the space to the extent that does not hinder themovement of the piezoelectric element 300, and the space may be sealedor, the space may not be sealed.

As the protective substrate 30, preferably, a material is used, such asglass or a ceramics having the same thermal expansion rate as that ofthe flow channel forming substrate 10. In the embodiment, a siliconmonocrystal substrate that is the same material as the flow channelforming substrate 10 is used and then the protective substrate 30 isformed.

The driving circuit 120 for driving the piezoelectric elements 300 thatare arranged in parallel is fixed on the protective substrate 30. As thedriving circuit 120, for example, a circuit substrate or a semiconductorintegrated circuit (IC) and the like can be used. Thus, the drivingcircuit 120, the first electrode 60 and the second electrode 80 areelectrically connected through a connection wiring 121 including aconductive wire such as a bonding wire or the like.

Also, a compliance substrate 40 having a seal film 41 and a fixed plate42 is bonded onto the protective substrate 30. The seal film 41 is madeof a flexible material having low stiffness and one surface of themanifold section 31 is sealed by the seal film 41. Also, the fixed plate42 is made of relatively hard material. An area of the fixed plate 42opposite to the manifold 100 is an opening 43 that is completelypenetrated in the thickness direction of the fixed plate 42 so that onesurface of the manifold 100 is sealed only by the flexible seal film 41.

In the ink jet type recording head of the embodiment, ink is drawn froman ink introduction inlet connected to an external ink supply unit (notshown), and after ink is filled in the interior from the manifold 100 tothe nozzle opening 21, the voltage is applied between the firstelectrode 60 and the second electrode 80 respectively in correspondenceto the pressure generation chamber 12 in accordance with a recordingsignal from the driving circuit 120, and the elastic film 50, theinsulator film 55, the first electrode 60 and the piezoelectric layer 70are deformed in a deflection manner so that the pressure in each of thepressure generation chambers 12 increases and thus ink droplets areejected from the nozzle opening 21.

The taper section 61 is provided in the boundary A between the activesection 320 and the inactive section 330 opposite the extending section65 of the first electrode 60 such that the width of the taper section 61is gradually decreased toward the boundary A from the active section320, so that the stress concentration toward the boundary A between theactive section 320 and the inactive section 330 is suppressed.Similarly, the taper section 61 is also provided at the boundary B ofthe extending section 65 side, so that the stress concentration towardthe boundary B between the active section 320 and the inactive section330 of the extending section 65 side is suppressed.

Second Embodiment

FIG. 5 is an enlarged plan view showing main parts of an ink jet typerecording head that is an example of the liquid ejecting head accordingto a second embodiment of the invention. Also, the constituent elementssimilar to those of the first embodiment are represented by similarreference numbers thereof, and the repetition of the description will beavoided.

As shown in FIG. 5, the piezoelectric element 300A of the secondembodiment has a first electrode 60A, the piezoelectric layer 70 and thesecond electrode 80.

The first electrode 60A has a straight-line section 62 provided at thecenter, a taper section 61A that is provided in a boundary A of the inksupply channel 14 side between the active section 320 and an inactivesection 330 such that the width of the taper section 61A is graduallydecreased toward the boundary A from the active section 320. Thus, thetaper section 61A of the first electrode 60A is provided further inside(the pressure generation chamber 12 side) than the end portion of thesecond electrode 80 in the longitudinal direction of the pressuregeneration chamber 12. Accordingly, the end portion of the ink supplychannel 14 side in the longitudinal direction (the longitudinaldirection of the pressure generation section 12) of the active section320 of the piezoelectric element 300 is defined by the taper section 61Aof the first electrode 60A.

Similarly to the above-described first embodiment, the first electrode60A has the taper section 61 that is provided in the boundary B betweenthe active section 320 and the inactive section 330 opposite to the inksupply channel 14 side such that the width of the taper section 61 isgradually decreased toward the boundary B from the active section 320.Furthermore, the first electrode 60A has the extending section 65 thatis extended to the outside of the piezoelectric layer 70 in the sideopposite to the ink supply channel 14. Similarly to the above-describedfirst embodiment, the extending section 65 has the narrow width section66, the gradual increasing section 67 and the drawn-out section 68.

The taper section 61A is provided in the first electrode 60A so that thestress concentration in the boundary A between the active section 320and the inactive section 330 of the ink supply channel 14 side issuppressed, and the occurrence of damage such as cracking or the likecan be decreased. Also, similarly to the above-described firstembodiment, the taper section 61 is also provided in the boundary B ofthe extending section 65 side of the first electrode 60A, so that thestress concentration in the boundary B between the active section 320and the inactive section 330 of the extending section 65 side issuppressed, and the occurrence of damage such as cracking or the likecan be decreased.

As in the first embodiment, when the end portion of the ink supplychannel 14 side of the first electrode 60A is provided further insidethan the end portion of the second electrode 80, the area of the activesection 320 (the excluded volume of the pressure generation chamber 12)becomes small. Thus, preferably, the end portion of the second electrode80 moves as near as possible to the end portion side of the pressuregeneration chamber 12 in a longitudinal direction and the end portion ofthe first electrode 60 also moves as near as possible to the secondelectrode 80.

Third Embodiment

FIG. 6 is an enlarged plan view showing main parts of an ink jet typerecording head that is an example of the liquid ejecting head accordingto a third embodiment of the invention. Also, the constituent elementssimilar to those of the first embodiment are represented by similarreference numbers thereof, and the repetition of the description will beavoided.

As shown in FIG. 6, a piezoelectric element 300B of the third embodimenthas a first electrode 60B, the piezoelectric layer 70 and the secondelectrode 80.

The first electrode 60B of the third embodiment is arranged so as to beat further outside than the end portion of the second electrode 80 ofthe pressure generation chamber 12 in the longitudinal direction. Thus,the end portion of the active section 320 in the longitudinal direction(the longitudinal direction of the pressure generation chamber 12) isdefined by the end portion of the second electrode 80.

The first electrode 60B has the straight-line section 62 that isprovided in the center and a taper section 61B that is provided in theboundary A of the ink supply channel 14 side between the active section320 and the inactive section 330 such that the width of the tapersection 61B is gradually decreased toward the boundary A from the activesection 320. The taper section 61B is provided so as to face the endportion of the second electrode 80. In other words, the taper section61B is provided such that the width of the taper section 61B isgradually decreased from the active section 320 that is the area facingthe second electrode 80 to the inactive section 330 which is the areanot facing the second electrode 80. Thus, preferably, width w₁ of theboundary A of the taper section 61B is 50% or less of the width w₀ ofthe center of the straight-line section 62, more preferably, 25% to 50%.Thus, the width w₁ of the boundary A is defined in this manner so thatsuitable stress dispersion can be reliably performed by the tapersection 61B of the boundary.

Similarly, the first electrode 60B has the taper section 61B that isprovided at the boundary B between the active section 320 and theinactive section 330 opposite to the ink supply channel 14, such thatthe width of the taper section 61B is gradually decreased toward theboundary B from the active section 320. The taper section 61B of theboundary B side is also provided to the inactive section 330 from theactive section 320, similar to the taper section 61B that is provided atthe boundary A of the ink supply channel 14 side. In other words, thetaper section 61B of the extending section 65 side is arranged so as toface the end portion of the second electrode 80. Also, the extendingsection 65 extends to the outside of the piezoelectric layer 70 from thetaper section 61B.

In the piezoelectric element 300B, the taper section 61B is provided inthe active section 320 and the inactive section 330, in other words, inthe boundaries A and B between the active section 320 and the inactivesection 330. Thus, because the first electrode 60B is present even inthe inactive section 330 at the boundary A side, the boundary A betweenthe active section 320 and the inactive section 330 does not conform tothe boundary of which the stiffness is rapidly changed, the stiffness ofthe piezoelectric element 300 is not rapidly changed in the boundary A,and then the stiffness can be steadily changed. In other words, thestiffness of the inactive section 330 becomes gradually higher towardthe active section 320 by the taper section 61B. In addition, theboundary between the active section 320 and the inactive section 330 isnot only the boundary of the driving area but also the boundary A ofwhich the stiffness is rapidly changed by whether the first electrode60B is present or not, so that when the boundary A between the activesection 320 and the inactive section 330 and the boundary in which thestiffness is rapidly changed are the same position, the stress can beeasily concentrated. In the embodiment, the taper section 61B isprovided to the inactive section 330 from the active section 320 so thatthe boundaries in which the stiffness is rapidly changed and theboundary A between the active section 320 and the inactive section 330are positioned at different positions, the stress can be furthereffectively dispersed.

Because the piezoelectric layer 70 formed on the end surface of thetaper section 61B have crystallization worse than the piezoelectriclayer 70 that is formed on the horizontal surface, the stressconcentration can be suppressed by even the decrease of the displacementamount caused by the degradation of the crystallization of thepiezoelectric layer 70 on the taper section 61B.

In the embodiment, the same taper sections 61B are provided on the inksupply channel 14 side and the extending section 65 side. Thus, twotaper sections 61B can be formed symmetrically in the longitudinaldirection in the area, which becomes the active section 320.

Fourth Embodiment

FIG. 7 is an enlarged plan view showing main parts of an ink jet typerecording head that is an example of the liquid ejecting head accordingto a fourth embodiment of the invention. Also, the constituent elementssimilar to those of the above-described embodiment are represented bysimilar reference numbers thereof, and the repetition of the descriptionwill be avoided.

As shown in FIG. 7, a piezoelectric element 300C has a first electrode60C, the piezoelectric layer 70 and the second electrode 80.

The first electrode 60C includes a straight-line section 62 that isprovided on the active section 320, the taper section 61B that isprovided on both end portions in a longitudinal direction and anextending section 63 that is continuously provided to the taper section61B of the ink supply channel 14 side. In other words, the otherconstitution is the same as that of the above-described third embodimentexcept the extending section 63 is provided on the first electrode 60B.

Even the piezoelectric element 300C can exhibit the same effect as thatof the above-described third embodiment is present.

Fifth Embodiment

FIG. 8 is an enlarged plan view showing main parts of an ink jet typerecording head that is an example of the liquid ejecting head accordingto a fifth embodiment of the invention. Also, the constituent elementssimilar to those of the above-described first embodiment are representedby similar reference numbers thereof, and the repetition of thedescription will be avoided.

As shown in FIG. 8, a piezoelectric element 300D includes a firstelectrode 60D, the piezoelectric layer 70 and the second electrode 80.

The first electrode 60D has a straight-line section 62 that is providedat the center, and a taper section 61D that is provided in the boundaryA of the ink supply channel 14 side between the active section 320 andthe inactive section 330 such that the width of the taper section 61D isgradually decreased toward the boundary A from the active section 320 ina step-like manner (step shape). Also, the taper section 61D is providedin the boundary between the active section 320 and the inactive section330. Specifically, the taper section 61D includes a first narrow widthsection 63 a narrower than the straight-line section 62, a second narrowwidth section 63 b narrower than the first narrow width section 63 a, athird narrow width section 63 c narrower than the second narrow widthsection 63 b, and a fourth narrow width section 63 d narrower than thethird narrow width section 63 c. The taper section 61D is provided, suchthat the width is gradually decreased from the first narrow widthsection to the fourth narrow width section 63 a to 63 d.

The first electrode 60D has a taper section 61D that is provided in theboundary B opposite to the ink supply channel 14 such that the width ofthe taper section 61D is gradually decreased toward the boundary B fromthe active section 320. Also, the first electrode 60D has an extendingsection 65A opposite to the ink supply channel 14. The extending section65A of the embodiment includes the narrow width section 66, a gradualincreasing section 67A that is gradually increased in the step-likemanner (step shape) similar to that of the taper section 61D, and thedrawn-out section 68.

Similar to the above-described third embodiment, in the piezoelectricelement 300D in which the taper section 61D is provided, the stressconcentration at the boundary A between the active section 320 and theinactive section 330 of the piezoelectric element 300D is also decreasedby the taper section 61D so that the risk of damage such as cracking andthe like can be suppressed. The taper section 61D is provided in theboundary B of the extending section 65A side so that the stressconcentration at the boundary B is decreased and the risk of damage suchas cracking and the like can be suppressed.

Also, in the embodiment, the gradual increasing section 67A of theextending section 65A is gradually increased in the step-like manner(step shape) similar to that of the taper section 61D, but the inventionis not specifically limited to the description and the gradualincreasing section 67A may be formed of which the width is graduallyincreased in a taper shape as in the first embodiment.

Sixth Embodiment

FIG. 9 is an enlarged plan view showing an main parts of the ink jettype liquid ejecting head that is an example of the liquid ejecting headaccording to a sixth embodiment. Also, the constituent elements similarto those of the above-described embodiment are represented by similarreference numbers thereof, and the repetition of the description will beavoided.

As shown in FIG. 9, the piezoelectric element 300E of the embodimentincludes a first electrode 60E, the piezoelectric layer 70 and thesecond electrode 80.

The first electrode 60E has a straight-line section 62 that is providedat the center, and a taper section 61E that is provided in the boundaryA of the ink supply channel 14 side between the active section 320 andthe inactive section 330 such that the width of the taper section 61E isgradually decreased toward the boundary A from the active section 320.The taper section 61E is provided in the boundary A between the activesection 320 and the inactive section 330. Specifically, the tapersection 61E includes a fifth narrow width section 63 e which has thewidth narrower than that of the straight-line section 62, a first tapersection 64 a that is continuous to the straight-line section 62 and thefifth narrow width section 63 e, a second taper section 64 b that isprovided in a side opposite to the first taper section 64 a of the fifthnarrow width section 63 e and the width thereof is gradually decreasedmore than that of the fifth narrow width section 63 e. In other words,the taper section 61E comprises the first taper section 64 a, the fifthnarrow width section 63 e and the second taper section 64 b. Also, theside surface of the boundary between the straight-line section 62 andthe first taper section 64 a is provided to be curved shape with anangular section removed(R chamfered). Similarly, the side surface of theboundary between the first taper section 64 a and the fifth narrow widthsection 63 e is R chamfered and the side surface of the boundary betweenthe fifth narrow width section 63 e and the second taper section 64 b isalso R chamfered. Furthermore, similarly, the tip end of the secondtaper section 64 b is also R chamfered and the side surface has a curvedshape with the all the angular portions removed to the taper section 61Efrom the straight-line section 62.

With the above configurations, the stress concentration toward theboundary A between the active section 320 and the inactive section 330of the piezoelectric element 300 can be decreased by the taper section61E and the side surface of the taper section 61E is a curved shape ofwhich angular portions are removed so that stress concentration towardthe portion where the width thereof is rapidly changed, can be furthersuppressed.

As shown in FIG. 9, the first electrode 60E has the taper section 61Ethat is provided in the boundary B between the active section 320 andthe inactive section 330 opposite to the ink supply channel 14 such thatthe width of the taper section 61E is gradually decreased toward theboundary B from the active section 320. In addition, an extendingsection 65B is continuously provided in the taper section 61E of theboundary B. The extending section 65B includes the narrow width section66, a gradual increasing section 67B of which the side surface has acurved shape with the angular portions removed (R chamfered), and thedrawn-out section 68. Accordingly, the stress concentration in theboundary B between the active section 320 and the inactive section 330on the extending section 65B side of the piezoelectric element 300 canbe suppressed.

Other Embodiments

Each of embodiments of the invention is described, but the basicconfigurations of the invention are not limited to the abovedescription. For example, in the above-described first to sixthembodiments, taper sections 61 to 61E are provided even in the endportion of the active section 320 opposite to the ink supply channel 14of the first electrodes 60 to 60E, but because this section is provideduntil the first electrodes 60 to 60E reaches to the inactive section 330from the active section 320 by the extending section 65 to 65B, thechange of stiffness due to whether the first electrodes 60 to 60E arepresent or not, is small. Accordingly, the taper sections 61 to 61E maybe provided to at least in the end portion opposite to the extendingsections 65 to 65B, and the taper section may not be provided at theextending sections 65 to 65B side. Of course, the taper sections of theextending sections 65 to 65B side may be a combination different fromthe taper sections 61 to 61E of the ink supply channel 14 opposite tothe extending sections 65 to 65B.

Also, in the above-described first to the sixth embodiments, the firstelectrodes 60 to 60E are formed in the substantially same thickness, butthe invention is not specifically limited to that. A modified example ofthe above-described first embodiment is shown in FIGS. 10A and 10B.FIGS. 10A and 10B are a plan view and sectional view showing the ink jettype recording head according to other embodiment of the invention.

As shown in FIGS. 10A and 10B, a piezoelectric element 300F includes afirst electrode 60F, a piezoelectric layer 70 and a second electrode 80.The first electrode 60F includes a straight-line section 62 and a tapersection 61 that are provided in the boundaries A and B. Also, the firstelectrode 60F is provided with an extending section 65C that iscontinuously to the taper section 61 at the boundary B side. Theextending section 65C includes a narrow width section 66A, the gradualincreasing section 67 and the drawn-out section 68, and the narrow widthsection 66A is formed thicker than other areas (mainly, thestraight-line section 62 of the center of the active section 320). Asdescribed above, since the narrow width section 66A is formed thickerthan other areas, electric resistance of the narrow width section 66A isdropped so that voltage that is applied to the piezoelectric element300F can be prevented from dropping by the narrow width section 66A. Ofcourse, areas except the narrow width section 66A, for example, thetaper section 61 and the gradual increasing section 67 or the like whichare continuously to the narrow width section 66A, may be formed with asimilar thickness to that of the narrow width section 66A. However, whenthe thickness of the straight-line section 62 is thick, the stiffness ofthe straight-line section 62 is increased, and there are concerns thatdisplacement of the piezoelectric element 300 will be hindered, so thatit is preferable if the first electrode 60 of the active section 320 isformed as thin as possible.

In the above-described embodiments, the silicon monocrystal substrate isexemplified as the flow channel forming substrate 10, but the inventionis not specifically limited to that, and for example, SOI substrate,glass material and the like may also be used.

In the above-described embodiments, the second electrodes 80 ofpiezoelectric elements 300 to 300F are exemplified which are continuousbetween adjacent pressure generation chambers 12, but the invention isnot specifically limited to those. The meaning that the secondelectrodes 80 are provided continuously to the plurality of pressuregeneration chambers 12 includes that the case where the secondelectrodes 80 is provided in a so-called comb teeth shape, that is, thesecond electrode 80 are separated between adjacent pressure generationchambers 12 and continuously provided in the outside between adjacentpressure generation chambers 12. Now, such an example is shown in FIG.11. FIG. 11 is an enlarged plan view showing main parts of an ink jettype recording head according to other embodiment of the invention. Asshown in FIG. 11, a piezoelectric element 300G has the first electrode60A, the piezoelectric layer 70 and a second electrode 80A. The secondelectrode 80A is separated between adjacent pressure generation chambers12 and continuous to the outside between adjacent pressure generationchambers 12, provided in so-called comb teeth shape. In thepiezoelectric element 300G, an end portion of the ink supply channel 14of the active section 320 in the longitudinal direction, in other words,boundary A is defined by the end portion (the taper section 61A) of thefirst electrode 60A. Also, an end portion of the active section 320 inthe lateral direction is defined by the width of the first electrode 60Aor may also be defined by the width of the second electrode 80A. In thecase, similarly to the above-described first embodiment, the tapersection 61A, the taper section 61 or the like are provided in the firstelectrode 60A so that the stress concentration in the boundary betweenthe active section 320 and the inactive section 330 can be suppressed.

Also, in the above-described example, even though a protective filmhaving wet resistance is not provided on the piezoelectric elements 300to 300G, because one end portion of the pressure generation chambers 12of the first electrodes 60 to 60F in longitudinal direction is coveredwith the piezoelectric layer 70, current between the first electrodes 60to 60F and the second electrodes 80 and 80A does not leak, and thus therisk of damage to the piezoelectric elements 300 to 300G can besuppressed. Also, the other end portion of the pressure generationchambers 12 of the first electrodes 60 to 60F in a longitudinaldirection is not covered with the piezoelectric layer 70, but because adistance is present between the first electrodes 60 to 60F and thesecond electrodes 80 and 80A, there is no influence particularly. Ofcourse, protective films having wet resistance are provided on thepiezoelectric elements 300 to 300G so that the piezoelectric elements300 to 300G can be reliably protected, but by not providing theprotective film as is the piezoelectric elements 300 to 300G of theabove-described examples, the protective films do not hinder thedisplacement of the piezoelectric elements 300 to 300G and largedisplacement thereof can be obtained.

In the above-described embodiments, the piezoelectric layer 70 isseparated in each of pressure generation chambers 12, but the inventionis not limited to that. For example, the piezoelectric layer 70 may becontinuously provided along the arrangement direction of the pressuregeneration chamber 12.

The ink jet type recording head of each of embodiments forms a part of arecording head unit having an ink flow channel linking with an inkcartridge or the like, and is mounted on the ink jet type recordingapparatus. FIG. 12 is a schematic view showing an example of the ink jettype recording apparatus.

In an ink jet type recording apparatus II shown in FIG. 12, cartridges2A and 2B constituting an ink supply unit are detachably provided inrecording head units 1A and 1B having the ink jet type recording head I.A carriage 3 on which the recording head units 1A and 1B are mounted, isprovided to be axially movable along a carriage shaft 5 attached to theapparatus main body 4. Recording head units 1A and 1B eject, forexample, a black ink composition and a color ink composition,respectively.

A driving force of a driving motor 6 is transmitted to the carriage 3through a plurality of gears (not shown) and a timing belt 7, and thecarriage 3 with the recording head units 1A and 1B mounted thereon movesalong the carriage shaft 5. A platen 8 is provided in the apparatus mainbody 4 along the carriage shaft 5. A recording sheet S, which is arecording medium such as paper or the like, fed by a sheet feed roller(not shown) or the like, is wound and transported on the platen 8.

Also, in the above-described ink jet type recording apparatus II, theink jet type recording head I (head units 1A and 1B) being mounted onthe carriage 3 and moving in the main scanning direction is exemplified,but the invention is not limited to that. For example, the ink jet typerecording head I is fixed and only the recording sheet S such as paperor the like moves in a sub-scanning direction so that the printing isperformed, and to so-called line type recording apparatus, the inventionmay also be applied.

In the above-described embodiments, the ink jet type recording head hasbeen described as an example of a liquid ejecting head, but theinvention is widely intended for liquid ejecting heads in general. Theinvention may be of course, applied to a liquid ejecting head ejecting aliquid other than ink. Other examples of the liquid ejecting headsinclude, for example, various recording heads used for an imagerecording apparatus, such as a printer or the like, a color materialejecting head that is used to manufacture a color filter of a liquidcrystal display or the like, an electrode material ejecting head that isused to form an electrode of an organic EL display, an FED (FieldEmission Display), or the like, a bioorganic ejecting head that is usedto manufacture a bio-chip, and the like.

1. A liquid ejecting head comprising: a flow channel forming substratehaving a pressure generation chambers communicating with a nozzleopening; and a piezoelectric element having a first electrode, apiezoelectric layer provided above the first electrode and a secondelectrode provided above the piezoelectric layer, wherein in andirection intersecting with the arrangement direction of the pressuregeneration chambers, in boundaries between an active section that is asubstantial driving section and inactive sections that is not asubstantial driving section of the piezoelectric layer, the firstelectrode includes a taper section of which a width is graduallydecreased toward the boundary from the active section side.
 2. Theliquid ejecting head according to claim 1, wherein the taper section isprovided such that the width thereof is gradually decreased in theactive section and the inactive section.
 3. The liquid ejecting headaccording to claim 1, wherein the side surface of the taper section isprovided to form an angle of 45° or less with respect to the sidesurface of a straight-line section of a center portion of the firstelectrode.
 4. The liquid ejecting head according to claim 1, wherein inthe direction intersecting with the arrangement direction of thepressure generation chamber, an extending section extends to the outsideof the piezoelectric layer at one end portion side of the firstelectrode, and the taper section is provided in at least one boundaryopposite to the extending section of boundaries between the activesection and the inactive section of the piezoelectric layer.
 5. Theliquid ejecting head according to claim 4, wherein the taper section isalso provided in the boundary of the extending section side of theboundaries between the active section and the inactive section of thepiezoelectric layer.
 6. The liquid ejecting head according to claim 5,wherein the taper section is provided so as to be symmetrical in thelongitudinal direction at the area in which the active section isformed.
 7. The liquid ejecting head according to claim 4, wherein anarea, of which the width is narrower than that of the straight-linesection that is provided on the center portion of the first electrode ofthe extending section, has a thickness thicker than that of thestraight-line section.
 8. A liquid ejecting apparatus comprising theliquid ejecting head according to claim
 1. 9. A liquid ejectingapparatus comprising the liquid ejecting head according to claim
 2. 10.A liquid ejecting apparatus comprising the liquid ejecting headaccording to claim
 3. 11. A liquid ejecting apparatus comprising theliquid ejecting head according to claim
 4. 12. A liquid ejectingapparatus comprising the liquid ejecting head according to claim
 5. 13.A liquid ejecting apparatus comprising the liquid ejecting headaccording to claim
 6. 14. A liquid ejecting apparatus comprising theliquid ejecting head according to claim 7.